⭕ Used Pump and controller in excellent working condition. We saw the machine in use and removed the pump ourselves. Im sorry, we do not have the cable that connects the controller and pump.


We are offering the Pump and Controller in this sale.

Comes with a 7 day right of return. You will have to pay shipping both ways.


Alcatel extends its product range by introducing ATH 2300M, a very high flow maglev turbopump designed for semiconductor etch processes. The ATH 2300M features 2 000 liters per second performance in a very compact package size.

Alcatel ATH 2300M is capable of pumping up to 2 000 sccm of argon in order to meet the highest requirements for the 0,12 micron geometry etching processes.

Alcatels particle reduction technology is featured in the ATH 2300M.. These extremely reliable pumps offer high troughput, high pressure, corrosive gas pumping and are quickly becoming the turbopump of choice in fabs throughout the world.

Additionally these pumps feature state of the art technologies which include :
- 5 active axes ; the most reliable and proven magnetic bearing technology.
- Automatic balancing system for any rotor imbalance compensation.
- Integrated heating system up to 75°c to eliminate the condensation of by-products.
- Inert gas purge to prevent particle build up.

The Alcatel Maglev Turbopumps are maintenance free, battery free dedicated to metal, dielectric or poly etch, ion implantation, sputtering and plasma deposition.