Oxford 90 Plus Ion Etcher

  • 6000.00 £
  • Published date: February 12, 2024
    • Lancs, Lancashire, United Kingdom

Oxford 90 Plus Ion Etcher


⭕ Oxford 90 Plus Reactive Ion Etcher - RIE with Load Lock
Reactive Ion Etcher with manual load Load lock
6 MFCs (BCl3, Cl2, CH4, H2, Ar, O2)
Pfeiffer Turbo TPH330PC and turbo controller on the Main chamber
Pfeiffer Turbo TMH 260C on the Load Lock
Advanced Energy RFX600 RF 600 Watt power supply
Complete system, tested, checked and fully working conditions
Delivery available

Phone number ✆ 01524 359173
Lancs, Lancashire




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