RPS MKS ASTRON AX7685 GENERATOR

  • 3500.00 £
  • Published date: April 13, 2024
    • Salford, Oxfordshire, United Kingdom

RPS MKS ASTRON AX7685 GENERATOR


⭕ ASTRON AX7685 Remote Plasma Source
TYPE AX7685 - REACTIVE GAS GENERATOR
This unit is new
The MKS ASTRON ex reactive gas generator is our highest output, self-contained reactive species source for chamber cleaning and other reactive gas applications. Relative to other plasma generating technologies, the ASTRONex reactive gas generator is more efficient, has lower cost of ownership and is capable of producing high flows from NF3, C3F8, CF4, and other gases. The design architecture integrates the power source, control module, and plasma chamber into a single compact module. Due to its simple interface, the ASTRONex reactive gas generator is easily integrated onto both new and existing production tools. Available for shipping.

Phone number ✆ 01865 592870
Salford, Oxfordshire




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